The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 09, 2014

Filed:

Jul. 28, 2009
Applicants:

Evgeny Milyutin, Ecublens, CH;

Paul Muralt, La Sarraz, CH;

Inventors:

Evgeny Milyutin, Ecublens, CH;

Paul Muralt, La Sarraz, CH;

Assignee:

Epcos AG, Munich, DE;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 41/04 (2006.01); H03H 9/58 (2006.01); H03H 9/17 (2006.01); H01L 41/107 (2006.01); H03H 9/56 (2006.01); H03H 9/02 (2006.01);
U.S. Cl.
CPC ...
H01L 41/107 (2013.01); H03H 9/583 (2013.01); H03H 9/171 (2013.01); H03H 9/562 (2013.01); H03H 9/175 (2013.01); H03H 9/02015 (2013.01);
Abstract

An acoustic wave resonator device comprising a resonant layer that comprises a series of side-by-side areas of first and second dielectric materials. In one embodiment the first dielectric material is a piezoelectric, in particular the first dielectric material can be a piezoelectric and the second dielectric material can be non-piezoelectric. In another embodiment, the first dielectric material is a piezoelectric of first polarity and the second dielectric material is a piezoelectric of opposite polarity or different polarity. Where needed, the resonant layer is supported on a reflector composed of series of layers of high acoustic impedance material(s) alternating with layers of low acoustic impedance material(s). For example, the reflector comprises AlN, AlO, Ta2O5, HfO2 or W as high impedance material and SiO2 as low impedance material.


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