The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 09, 2014
Filed:
May. 25, 2011
Masahiro Sakuragi, Kyoto, JP;
Toma Fujita, Kyoto, JP;
Mizuho Okada, Kyoto, JP;
Rohm Co., Ltd., Kyoto, JP;
Abstract
[Subject] To provide a pressure sensor capable of implementing cost reduction and miniaturization. [Solving Means] A pressure sensorincludes a silicon substrateprovided therein with a reference pressure chamber, a diaphragm, consisting of part of the silicon substrate, formed on a surface layer portion of the silicon substrateto partition a reference pressure chamber, and an etching stop layerformed on a lower surface of the diaphragmfacing the reference pressure chamber. A through-holecommunicating with the reference pressure chamberis formed on the diaphragm, and a filleris arranged in the through-hole
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile