The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 09, 2014

Filed:

Oct. 19, 2010
Applicants:

Kosuke Kurachi, Kawasaki, JP;

Masahiko Kubota, Tokyo, JP;

Akihiko Okano, Kawasaki, JP;

Atsushi Hiramoto, Machida, JP;

Inventors:

Kosuke Kurachi, Kawasaki, JP;

Masahiko Kubota, Tokyo, JP;

Akihiko Okano, Kawasaki, JP;

Atsushi Hiramoto, Machida, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B23K 26/42 (2006.01); B23K 26/40 (2014.01); B23K 26/18 (2006.01); B23K 26/36 (2014.01); H01L 21/268 (2006.01); B23K 26/00 (2014.01);
U.S. Cl.
CPC ...
B23K 26/421 (2013.01); B23K 26/4075 (2013.01); B23K 26/18 (2013.01); B23K 26/365 (2013.01); H01L 21/268 (2013.01); B23K 26/0057 (2013.01);
Abstract

A laser processing method of processing an object to be processed. The object to be processed has a modified portion and a non-modified portion. A modified layer forming step forms a modified layer of the object to be processed by scanning an inner portion of the object with a condensing point of first laser light. The modified layer (i) has a processing speed with second laser light that is lower than a processing speed of a non-modified portion and (ii) is formed below the non-modified portion. A removing step removes a portion of the non-modified portion. The portion of the non-modified portion ranges from a surface of the object to the modified layer. The removing step includes irradiating the portion of the non-modified portion with the second laser light.


Find Patent Forward Citations

Loading…