The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 09, 2014

Filed:

Nov. 22, 2010
Applicants:

Ryota Suzuki, Otsu, JP;

Yoshio Umayahara, Otsu, JP;

Inventors:

Ryota Suzuki, Otsu, JP;

Yoshio Umayahara, Otsu, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B32B 13/04 (2006.01); C03B 29/00 (2006.01); H01L 21/22 (2006.01); C04B 35/18 (2006.01); H01L 21/223 (2006.01);
U.S. Cl.
CPC ...
H01L 21/2225 (2013.01); C04B 2237/064 (2013.01); C04B 2237/062 (2013.01); C04B 2237/341 (2013.01); C04B 2237/343 (2013.01); C04B 35/18 (2013.01); H01L 21/223 (2013.01);
Abstract

Provided is a dopant host with which the amount of BOvolatilized is unlikely to decrease over time and that has good BOvolatilizing ability for a long period of time. The dopant host has a laminate that includes a boron component volatilization layer containing 30 to 60 mol % of SiO, 10 to 30 mol % of AlO, 15 to 50 mol % of BO, and 2 to 15 mol % of RO (R is an alkaline earth metal) and a heat resistant layer containing 8 to 40 mol % of SiO, 40 to 85 mol % of AlO, 5 to 30 mol % of BO, and 0.5 to 7 mol % of RO (R is an alkaline earth metal). At least one outermost layer of the laminate is composed of the boron component volatilization layer. The laminate further includes the boron component volatilization layer inside the laminate. The boron component volatilization layer constituting at least one outermost layer of the laminate has a BOcontent lower than the BOcontent in the boron component volatilization layer inside the laminate.


Find Patent Forward Citations

Loading…