The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 09, 2014
Filed:
Feb. 22, 2008
Jari Ruuttu, Billnäs, FI;
Vesa Myllymäki, Helsinki, FI;
Reijo Lappalainen, Hiltulanlahti, FI;
Lasse Pulli, Helsinki, FI;
Juha Mäkitalo, Tammisaari, FI;
Sampo Ylätalo, Helsinki, FI;
Jari Ruuttu, Billnäs, FI;
Vesa Myllymäki, Helsinki, FI;
Reijo Lappalainen, Hiltulanlahti, FI;
Lasse Pulli, Helsinki, FI;
Juha Mäkitalo, Tammisaari, FI;
Sampo Ylätalo, Helsinki, FI;
Picodeon Ltd Oy, Helsinki, FI;
Abstract
The invention relates in general level to radiation transference techniques as applied for utilization of material handling. The invention relates to a radiation source arrangement comprising a path of radiation transference, or an improved path of radiation transference, which path comprises a scanner or an improved scanner. The invention also concerns a target material suitable for vaporization and/or ablation. The invention concerns an improved scanner. The invention concerns also to a vacuum vaporization/ablation arrangement that has a radiation source arrangement according to invention. The invention concerns also a target material unit, to be used in coating and/or manufacturing target material.