The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 09, 2014
Filed:
Nov. 30, 2010
Applicants:
Goetz Teschner, Dresden, DE;
Hans-jürgen Heinrich, Groβröhrsdorf, DE;
Harald Grune, Dresden, DE;
Sven Haehne, Dresden, DE;
Inventors:
Goetz Teschner, Dresden, DE;
Hans-Jürgen Heinrich, Groβröhrsdorf, DE;
Harald Grune, Dresden, DE;
Sven Haehne, Dresden, DE;
Assignee:
VON ARDENNE Anlagentechnik GmbH, Dresden, DE;
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/34 (2006.01); H01J 37/34 (2006.01);
U.S. Cl.
CPC ...
C23C 14/3407 (2013.01); H01J 37/3405 (2013.01); H01J 37/3435 (2013.01);
Abstract
A support device for a magnetron arrangement with a rotating target includes a housing with a drive shaft mounted to rotate in the housing. An end of the drive shaft accessible from outside of the housing connects to the rotating target and another end lies within the housing for introduction of a torque. An electric motor with a stator and a rotor is arranged within the housing to generate a torque.