The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 09, 2014
Filed:
Jul. 12, 2006
Jean-michel Rius, Octeville-sur-Mer, FR;
Guy Feuilloley, Octeville-sur-Mer, FR;
Jean-Michel Rius, Octeville-sur-Mer, FR;
Guy Feuilloley, Octeville-sur-Mer, FR;
Sidel Participations, Octeville sur Mer, FR;
Abstract
An apparatus () for PECVD deposition of a thin layer of a barrier-effect material in a receptacle (), the apparatus comprising: a structure () receiving the receptacle (), said structure () defining a plasma-presence zone (), said structure () being provided with an orifice () defining an axis (A) and presenting an inside opening () opening out into the plasma-presence zone (), and an outside opening () opening out outside said zone (); an electromagnetic wave generator; and an optical plasma monitor device () including a pick-up () placed outside the plasma-presence zone () on the axis (A) of said orifice.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile