The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 09, 2014
Filed:
Jul. 14, 2009
Applicants:
Mark Andreas, Wangs, CH;
Joerg Kerschbaumer, Feldkirch, AT;
Stefan Schneider, Valens, CH;
Arno Zindel, Maienfeld, CH;
Inventors:
Mark Andreas, Wangs, CH;
Joerg Kerschbaumer, Feldkirch, AT;
Stefan Schneider, Valens, CH;
Arno Zindel, Maienfeld, CH;
Assignee:
Oberlikon Solar AG, Trubbach, Trubbach, CH;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B05C 13/02 (2006.01); H01L 31/18 (2006.01); C23C 16/458 (2006.01); C23C 16/54 (2006.01);
U.S. Cl.
CPC ...
H01L 31/18 (2013.01); C23C 16/4583 (2013.01); C23C 16/54 (2013.01);
Abstract
A cover for a roller having at least one roller () for transporting a substrate () in a deposition system and at least one cover means (), wherein the roller is retractable away from the substrate and the cover means is adapted for at least partly covering the retracted roller against contamination by a substance present in the deposition system. The cover for a roller has the advantage that the uptime of the deposition system is increased.