The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 02, 2014

Filed:

Mar. 10, 2011
Applicant:

Martin Kerber, Munich, DE;

Inventor:

Martin Kerber, Munich, DE;

Assignee:

Infineon Technologies AG, Neubiberg, DE;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01R 31/02 (2006.01);
U.S. Cl.
CPC ...
Abstract

Techniques disclosed herein stress a dielectric layer until a pre-catastrophic, stress induced leakage current (SILC) condition is detected. When the pre-catastrophic SILC condition is detected, the stress is removed to prevent catastrophic failure of the dielectric and its associated device. Because these techniques prevent catastrophic failure of the dielectric layer, engineers can carry out physical failure analysis of the device, which is now known to have some type of defect due to detection of the pre-catastrophic SILC condition. In this way, the techniques disclosed herein allow engineers to more quickly determine an underlying cause of a defect so that yields can be kept at optimal levels.


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