The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 02, 2014

Filed:

Oct. 03, 2012
Applicant:

Denso Corporation, Kariya, JP;

Inventors:

Yuma Kagata, Kariya, JP;

Nozomu Akagi, Kariya, JP;

Assignee:

DENSO CORPORATION, Kariya, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 29/78 (2006.01);
U.S. Cl.
CPC ...
H01L 29/7827 (2013.01);
Abstract

A semiconductor device includes a vertical semiconductor element having a super junction structure constructed of a first conductivity-type drift layer disposed on a surface of a semiconductor substrate and second conductivity-type regions having a stripe shape defining a longitudinal direction in one direction and being arranged at a predetermined column pitch in the drift layer. When a surplus concentration obtained by dividing a difference between an electrical charge of the second conductivity-type region and an electrical charge of a first conductivity-type region by the column pitch is i, a depth of the super junction structure is z, a surplus concentration gradient as a change of the surplus concentration i per unit depth dz is di/dz, and a central withstand voltage in which a margin is added to a desired withstand voltage is V, the super junction structure is configured such that the surplus concentration gradient di/dz satisfies a relation of


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