The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 02, 2014
Filed:
Jul. 11, 2013
Applicant:
Sumitomo Heavy Industries, Ltd., Tokyo, JP;
Inventor:
Toru Asaba, Ehime, JP;
Assignee:
Sumitomo Heavy Industries, Ltd., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 3/08 (2006.01); H05H 7/12 (2006.01); H05H 7/00 (2006.01);
U.S. Cl.
CPC ...
H01J 3/08 (2013.01); H05H 2007/007 (2013.01); H05H 7/00 (2013.01); H05H 2007/004 (2013.01); H05H 7/12 (2013.01);
Abstract
A charged particle beam irradiation apparatus includes: a scanning electromagnet that scans a charged particle beam; and a degrader that is provided on a downstream side of the scanning electromagnet in a scanning direction of the charged particle beam and adjusts a range of the charged particle beam by reducing energy of the charged particle beam. The degrader is configured to be closer to an upstream side in the scanning direction of the charged particle beam, outward in the scanning direction.