The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 02, 2014
Filed:
Sep. 07, 2012
Applicants:
Hubertus Von Der Waydbrink, Dresden, DE;
Georg Laimer, Meissen, DE;
Siegfried Scheibe, Dresden, DE;
Ricky C. Powell, Ann Arbor, MI (US);
James Ernest Hinkle, Lambertville, MI (US);
James B. Foote, Toledo, OH (US);
Inventors:
Hubertus von der Waydbrink, Dresden, DE;
Georg Laimer, Meissen, DE;
Siegfried Scheibe, Dresden, DE;
Ricky C. Powell, Ann Arbor, MI (US);
James Ernest Hinkle, Lambertville, MI (US);
James B. Foote, Toledo, OH (US);
Assignee:
First Solar, Inc., Perrysburg, OH (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C 16/00 (2006.01); B05C 13/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A transport device and method of transporting a substrate using a rotatable shaft and baffles may be used to extend cleaning intervals for the transport device and reduce deposition of a vapor deposition material upon the transport device.