The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 02, 2014
Filed:
Aug. 18, 2011
Applicants:
Masahiro Kimura, Kyoto, JP;
Tomonori Kojimaru, Kyoto, JP;
Tetsuya Emoto, Kyoto, JP;
Manabu Okutani, Kyoto, JP;
Masayuki Otsuji, Kyoto, JP;
Inventors:
Masahiro Kimura, Kyoto, JP;
Tomonori Kojimaru, Kyoto, JP;
Tetsuya Emoto, Kyoto, JP;
Manabu Okutani, Kyoto, JP;
Masayuki Otsuji, Kyoto, JP;
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/00 (2006.01); B05D 3/02 (2006.01);
U.S. Cl.
CPC ...
Abstract
A liquid hydrophobizing agent is supplied to a substrate and a surface of the substrate is hydrophobized. A solvent, lower in surface tension than water and capable of dissolving the hydrophobizing agent, is supplied to the substrate in a pre-drying rinsing step. Thereafter, the substrate is dried. The substrate to be processed is maintained in a state of not contacting water until it is dried after being hydrophobized.