The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 02, 2014
Filed:
Jun. 02, 2010
Clifton Higdon, Birmingham, MI (US);
Alaa A. Elmoursi, Troy, MI (US);
Jason Goldsmith, Meadville, PA (US);
Bruce Cook, Ankeny, IA (US);
Peter Blau, Knoxville, TN (US);
Qu Jun, Knoxville, TN (US);
Robert Milner, Warren, MI (US);
Clifton Higdon, Birmingham, MI (US);
Alaa A. Elmoursi, Troy, MI (US);
Jason Goldsmith, Meadville, PA (US);
Bruce Cook, Ankeny, IA (US);
Peter Blau, Knoxville, TN (US);
Qu Jun, Knoxville, TN (US);
Robert Milner, Warren, MI (US);
Other;
Abstract
A target for use in an ion beam sputtering apparatus made of at least two target tiles where at least two of the target tiles are made of different chemical compositions and are mounted on a main tile and geometrically arranged on the main tile to yield a desired chemical composition on a sputtered substrate. In an alternate embodiment, the tiles are of varied thickness according to the desired chemical properties of the sputtered film. In yet another alternate embodiment, the target is comprised of plugs pressed in a green state which are disposed in cavities formed in a main tile also formed in a green state and the assembly can then be compacted and then sintered.