The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 02, 2014

Filed:

Aug. 21, 2009
Applicants:

Hiroshi Tamagaki, Takasago, JP;

Toshiki Segawa, Takasago, JP;

Inventors:

Hiroshi Tamagaki, Takasago, JP;

Toshiki Segawa, Takasago, JP;

Assignee:

Kobe Steel, Ltd., Kobe-shi, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C 16/00 (2006.01); C23C 14/00 (2006.01); C23C 14/24 (2006.01); C23C 14/56 (2006.01);
U.S. Cl.
CPC ...
C23C 14/24 (2013.01); C23C 14/562 (2013.01);
Abstract

Provided is a continuous deposition apparatus wherein replacement operations of a feeding unit and a take-up unit are easily performed. The continuous deposition apparatus is provided with: a vacuum chamber (); a deposition roller (); evaporation sources (LLR) which supply a deposition material to a film substrate from the side of the film substrate which is wound on the deposition roller and on which a coating is to be deposited; a feeding unit () which supplies the film substrate to the deposition roller (); and a take-up unit () which takes up the film substrate after the coating is deposited thereon. The vacuum chamber () is provided with: an evaporation source opening for carrying out and carrying in the evaporation sources; evaporation source door sections (L,R) which open and close the evaporation source opening; another opening provided for the substrate on which the coating is to be deposited, besides the evaporation source opening, for the purpose of carrying out and carrying in the feeding unit () and the take-up unit (); and door sections (L,R) which are provided for the substrate and open and close the opening provided for the substrate.


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