The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 02, 2014
Filed:
Jan. 18, 2011
Applicants:
Jin-woo Ahn, Daejeon, KR;
Eun-suck Choi, Gumi-si, KR;
Bong-woo Kim, Gumi-si, KR;
Hwan-su Yu, Gumi-si, KR;
Jae-hwan Yi, Gumi-si, KR;
Inventors:
Jin-Woo Ahn, Daejeon, KR;
Eun-Suck Choi, Gumi-si, KR;
Bong-Woo Kim, Gumi-si, KR;
Hwan-Su Yu, Gumi-si, KR;
Jae-Hwan Yi, Gumi-si, KR;
Assignee:
Siltron Inc., Gyeongbuk, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B24B 7/17 (2006.01); B24B 37/34 (2012.01);
U.S. Cl.
CPC ...
B24B 37/345 (2013.01);
Abstract
A wafer unloading system and wafer processing equipment (system) including the same are disclosed. The wafer unloading system includes a fluid supply tube for supplying a fluid, a nozzle for injecting the supplied fluid, and an injection hole defined in a plate to allow the injected fluid to reach a space between a polishing pad and a wafer.