The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 02, 2014
Filed:
Mar. 10, 2010
Applicants:
Kaoru Naoi, Yokohama, JP;
Yoichi Ishizaki, Sodegaura, JP;
Tatsuhito Inouchi, Ichihara, JP;
Masahiro Iwasaki, Yokohama, JP;
Inventors:
Kaoru Naoi, Yokohama, JP;
Yoichi Ishizaki, Sodegaura, JP;
Tatsuhito Inouchi, Ichihara, JP;
Masahiro Iwasaki, Yokohama, JP;
Assignee:
Kuroda Precision Industries Ltd., Kawasaki-shi, Kanagawa, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B 5/25 (2006.01); H01L 21/67 (2006.01); G01B 5/00 (2006.01); G01B 11/30 (2006.01); G05B 19/19 (2006.01); G01B 7/34 (2006.01);
U.S. Cl.
CPC ...
G01B 11/306 (2013.01); H01L 21/67288 (2013.01); G01B 5/0009 (2013.01); G05B 2219/41264 (2013.01); G05B 2219/41007 (2013.01); G05B 2219/42336 (2013.01); G05B 19/19 (2013.01); G01B 7/345 (2013.01);
Abstract
In a parallel slider device, the two sliders are allowed to move in a smooth manner without interfering with each other. A same position command is given to a front servo controller for a front linear servo motor and a rear servo controller for a rear linear servo motor, and the front servo controller and the rear servo controller are provided with mutually different control gains.