The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 26, 2014
Filed:
Mar. 12, 2012
Michio Taniguchi, Tottori, JP;
Yoshinori Tsuruda, Osaka, JP;
Michio Taniguchi, Tottori, JP;
Yoshinori Tsuruda, Osaka, JP;
Daihen Corporation, Osaka, JP;
Abstract
There is provided a high frequency power supply device. The power control unit comprises an impedance adjuster that includes a variable reactance element and adjusts a load side impedance by changing a reactance value of the variable reactance element, and an impedance control unit that controls the variable reactance element of the impedance adjuster in response to a power value detected by a power detection unit so as to perform control of approximating the power value of the high frequency power, which is fed from the high frequency power generation unit to the load, to the setting value or control of maintaining the power value within the set allowable range by changing a resistance of the load side impedance in response to the power value detected by the power detection unit.