The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 26, 2014
Filed:
Jul. 10, 2013
Jochen Zoellin, Muellheim, DE;
Ricardo Ehrenpfordt, Korntal-Muenchingen, DE;
Juergen Graf, Stuttgart, DE;
Christoph Schelling, Stuttgart, DE;
Frederik Ante, Stuttgart, DE;
Michael Curcic, Stuttgart, DE;
Jochen Zoellin, Muellheim, DE;
Ricardo Ehrenpfordt, Korntal-Muenchingen, DE;
Juergen Graf, Stuttgart, DE;
Christoph Schelling, Stuttgart, DE;
Frederik Ante, Stuttgart, DE;
Michael Curcic, Stuttgart, DE;
Robert Bosch GmbH, Stuttgart, DE;
Abstract
A microphone component has a micromechanical microphone pattern which is implemented in a layer construction on a semiconductor substrate and includes (i) an acoustically active diaphragm which at least partially spans a sound opening on the backside of the substrate, (ii) at least one movable electrode of a microphone capacitor system, and (iii) a stationary acoustically penetrable counterelement having through holes, which counterelement is situated in the layer construction over the diaphragm and functions as the carrier for at least one immovable electrode of the microphone capacitor system. The diaphragm is tied in to the semiconductor substrate in a middle area, and the diaphragm has a corrugated sheet metal type of corrugation, at least in regions.