The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 26, 2014
Filed:
May. 30, 2013
International Business Machines Corporation, Armonk, NY (US);
Global Foundries Inc., Cayman Islands, KY;
Robert J. Miller, Yorktown Heights, NY (US);
Tenko Yamashita, Schenectady, NY (US);
Hui Zang, Albany, NY (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
Methods and systems for forming multigate devices and systems are disclosed. In accordance with one such method, a fin is formed on a semiconductor substrate including a carbon-doped semiconductor layer. Further, a first portion of semiconductor material that is beneath the fin is removed to form a void beneath the fin by etching the material such that the fin is supported by at least one supporting pillar of the semiconducting material and such that the carbon-doped semiconductor layer prevents the etching from removing at least a portion of the fin. A dielectric material is deposited in the void to isolate the fin from a second portion of semiconductor material that is below the void. In addition, source and drain regions are formed in the fin and a gate structure is formed over the fin to fabricate the multigate device such that the dielectric material reduces current leakage beneath the device.