The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 26, 2014
Filed:
Oct. 02, 2009
Joshua Mangum, Basking Ridge, NJ (US);
Eric A. Armour, Pennington, NJ (US);
William E. Quinn, Whitehouse Station, NJ (US);
Joshua Mangum, Basking Ridge, NJ (US);
Eric A. Armour, Pennington, NJ (US);
William E. Quinn, Whitehouse Station, NJ (US);
Veeco Instruments Inc., Plainview, NY (US);
Abstract
Methods of depositing compound semiconductors onto substrates are disclosed, including directing gaseous reactants into a reaction chamber containing the substrates, selectively supplying energy to one of the gaseous reactants in order to impart sufficient energy to activate that reactant but insufficient to decompose the reactant, and then decomposing the reactant at the surface of the substrate in order to react with the other reactants. The preferred energy source is microwave or infrared radiation, and reactors for carrying out these methods are also disclosed.