The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 26, 2014

Filed:

Oct. 03, 2008
Applicants:

Abhaya K. Bakshi, Westford, MA (US);

Isaac K. Cherian, Shrewsbury, MA (US);

Inventors:

Abhaya K. Bakshi, Westford, MA (US);

Isaac K. Cherian, Shrewsbury, MA (US);

Assignee:
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
B32B 5/16 (2006.01); B24D 18/00 (2006.01); C09C 1/28 (2006.01);
U.S. Cl.
CPC ...
Abstract

Improved silicon carbide particles, improved silicon carbide abrasive particles, and abrasive slurry compositions for use chemical mechanical planarization (CMP) processes. The particles can comprise nano-sized silicon carbide particles, particularly silicon carbide particles having a surface chemistry similar to silica.


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