The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 26, 2014
Filed:
Oct. 03, 2008
Applicants:
Abhaya K. Bakshi, Westford, MA (US);
Isaac K. Cherian, Shrewsbury, MA (US);
Inventors:
Abhaya K. Bakshi, Westford, MA (US);
Isaac K. Cherian, Shrewsbury, MA (US);
Assignee:
Saint-Gobain Ceramics & Plastics, Inc., Worcester, MA (US);
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
B32B 5/16 (2006.01); B24D 18/00 (2006.01); C09C 1/28 (2006.01);
U.S. Cl.
CPC ...
Abstract
Improved silicon carbide particles, improved silicon carbide abrasive particles, and abrasive slurry compositions for use chemical mechanical planarization (CMP) processes. The particles can comprise nano-sized silicon carbide particles, particularly silicon carbide particles having a surface chemistry similar to silica.