The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 26, 2014
Filed:
Aug. 17, 2010
Jong-won Hong, Yongin, KR;
Min-jae Jeong, Yongin, KR;
Heung-yeol NA, Yongin, KR;
Eu-gene Kang, Yongin, KR;
Seok-rak Chang, Yongin, KR;
Jong-Won Hong, Yongin, KR;
Min-Jae Jeong, Yongin, KR;
Heung-Yeol Na, Yongin, KR;
Eu-Gene Kang, Yongin, KR;
Seok-Rak Chang, Yongin, KR;
Samsung Display Co., Ltd., Yongin, KR;
Abstract
A substrate processing apparatus includes a heating unit that heats a processing chamber that processes a plurality of substrates and that quickly cools the processing chamber after the processing. The heating unit includes a body having an intake port and an exhaust port, one or more heaters located inside the body, a cooler connected to the intake port of the body, an exhaust pump connected to the exhaust port of the body, and a controller controlling the cooler. The substrate processing apparatus includes a boat in which a plurality of substrates are stacked, a processing chamber providing a space in which the substrates are processed, a transfer unit carrying the boat into or out of the processing chamber, and the heating unit located outside the processing chamber.