logo

For the Inventor, By the Inventor

The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 8810992 B1

PDFFull Text
Date of Patent:
Aug. 19, 2014

Filed:

Jul. 26, 2011

Electrostatic chuck

Applicant:

Hiroshi Ono, Kirishima, JP;

Inventor:

Hiroshi Ono, Kirishima, JP;

Assignee:

Kyocera Corporation, Kyoto, JP;

Attorney:

Volpe and Koenig, P.C.

Primary Examiner:

Dharti Patel

Int. Cl.
CPC ...
H01L 21/683 (2006.01); H01T 23/00 (2006.01); C04B 35/185 (2006.01); C04B 35/581 (2006.01); C04B 35/111 (2006.01); C04B 35/195 (2006.01);
U.S. Cl.
CPC ...
H01L 21/683 (2013.01); C04B 2235/5436 (2013.01); C04B 35/185 (2013.01); C04B 35/581 (2013.01); C04B 2235/3262 (2013.01); C04B 2235/3418 (2013.01); C04B 35/111 (2013.01); C04B 2235/72 (2013.01); C04B 2235/3206 (2013.01); C04B 2235/3208 (2013.01); H01L 21/6833 (2013.01); C04B 2235/61 (2013.01); C04B 2235/6025 (2013.01); C04B 2235/3272 (2013.01); C04B 2235/5445 (2013.01); C04B 2235/3241 (2013.01); C04B 2235/3232 (2013.01); C04B 35/195 (2013.01);
Abstract

There is provided an electrostatic chuck an electrostatic chuck in which it is hard for the power of suppressing residual adsorption to deteriorate over time. There is provided an electrostatic chuck including an insulating substrate, and an adsorption electrode, wherein a region which includes at least an upper face of the insulating substrate containing Mn is made of ceramics containing a first transition element composed of at least one of Fe and Cr, and a ratio C2/C1 of a content C2 (mol) of the first transition element to a content C1 (mol) of Mn contained in the insulating substrate is 1 or more.

Find Patent Forward Citations

Ono, Hiroshi. (2014). Electrostatic chuck (U.S. Patent No. 8810992). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/8810992

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Loading…