The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 19, 2014
Filed:
Mar. 13, 2012
Applicants:
Thomas Sulzbach, Weisendorf, DE;
Wolfgang Engl, Erlangen, DE;
Christoph Richter, Forchheim, DE;
Inventors:
Assignee:
NanoWorld AG, Neuchatel, CH;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 41/04 (2006.01); H02N 2/00 (2006.01); G01N 29/036 (2006.01); G01N 29/02 (2006.01); G01Q 10/04 (2010.01); G01Q 20/04 (2010.01); B81B 7/00 (2006.01); B82Y 35/00 (2011.01);
U.S. Cl.
CPC ...
G01Q 20/04 (2013.01); G01N 2291/0427 (2013.01); B82Y 35/00 (2013.01); G01N 29/036 (2013.01); G01N 2291/0256 (2013.01); G01N 29/022 (2013.01); G01Q 10/045 (2013.01); B81B 7/0006 (2013.01);
Abstract
A micro-mechanical component including a support element and a cantilever with integrated electrical functional element to which at least two electrical supply lines implemented as printed conductors on the cantilever are routed. The invention proposes to arrange at least one each of the supply lines on the two opposite flat surfaces of the cantilever and/or the support element. The functional element is supplied by the first supply line on a first flat surface, with the second supply line on the opposite flat surface serving as return line.