The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 19, 2014
Filed:
May. 29, 2009
Sylvain Ballandras, Besancon, FR;
Dorian Gachon, Besancon, FR;
Sylvain Ballandras, Besancon, FR;
Dorian Gachon, Besancon, FR;
Centre National de la Recherche Scientifique (C.N.R.S.), Paris, FR;
Universite de Franche Comte, Besancon, FR;
Abstract
The invention relates to a resonator of the high bulk acoustic resonator HBAR type, for operating at a pre-determined working frequency, comprising: a piezoelectric transducer (), an acoustic substrate (), a counter-electrode () formed by a metal layer adhering to a first face of the transducer () and a face of the acoustic substrate (), and an electrode () arranged on a second face of the transducer () facing away from the first face of the transducer () and the substrate (). Said resonator is characterized in that the relative arrangement of the transducer () and the substrate () is such that the polarization direction P of the shearing mode of the transducer () and the direction of polarization P of the at least one shearing mode of the substrate () corresponding to the second cutting angle θare aligned, and the second cutting angle θof the substrate () is such that the temperature coefficient of the frequency of the corresponding first order CTFBis a local extremum with an absolute value of less than 20 ppm·K, and the variation of CTFBfrom said value of Θis slight with an absolute value of less than 2 ppm·K/degree.