The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 19, 2014

Filed:

Sep. 24, 2009
Applicants:

Freddy Roozeboom, Waalre, NL;

Martijn Goossens, Veldhoven, NL;

Willem Frederik Adrianus Besling, Eindhoven, NL;

Nynke Verhaegh, Arnhem, NL;

Inventors:

Freddy Roozeboom, Waalre, NL;

Martijn Goossens, Veldhoven, NL;

Willem Frederik Adrianus Besling, Eindhoven, NL;

Nynke Verhaegh, Arnhem, NL;

Assignee:

NXP B.V., Eindhoven, NL;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 27/14 (2006.01); B81B 3/00 (2006.01); B81C 1/00 (2006.01); H01L 29/41 (2006.01); H01L 49/02 (2006.01);
U.S. Cl.
CPC ...
H01L 29/41 (2013.01); B81C 2201/0132 (2013.01); H01L 28/91 (2013.01); B81C 2201/0112 (2013.01); B81B 2201/06 (2013.01); B81B 3/007 (2013.01); B81C 1/00619 (2013.01);
Abstract

The invention relates to an semi-conductor device comprising a first surface and neighboring first and second electric elements arranged on the first surface, in which each of the first and second elements extends from the first surface in a first direction, the first element having a cross section substantially perpendicular to the first direction and a sidewall surface extending at least partially in the first direction, wherein the sidewall surface comprises a first section and a second section adjoining the first section along a line extending substantially parallel to the first direction, wherein the first and second sections are placed at an angle with respect to each other for providing an inner corner wherein the sidewall surface at the inner corner is, at least partially, arranged at a constant distance R from a facing part of the second element for providing a mechanical reinforcement structure at the inner corner.


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