The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 19, 2014
Filed:
Mar. 08, 2010
Applicants:
Makoto Akita, Hsinchu, TW;
Isao Yoshida, Ikeda, JP;
Kazuhiko Hashimoto, Toyonaka, JP;
Inventors:
Assignee:
Sumitomo Chemical Company, Limited, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/039 (2006.01); C08F 32/08 (2006.01); C08F 20/30 (2006.01);
U.S. Cl.
CPC ...
Abstract
A compound represented by the formula (I): wherein Rrepresents a hydrogen atom etc., Rand Reach independently represent a hydrogen atom etc., Rrepresents a C1-C8 divalent hydrocarbon group, Rrepresents a single bond etc., and Rrepresents an unsubstituted or substituted C6-C20 aromatic hydrocarbon group, a polymer comprising a structural unit derived from the compound represented by the formula (I) and a chemically amplified positive resist composition comprising the polymer, at least one acid generator and at least one solvent.