The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 19, 2014

Filed:

May. 01, 2010
Applicants:

Conor F. Madigan, San Francisco, CA (US);

Alexander Sou-kang Ko, Santa Clara, CA (US);

Jianglong Chen, San Jose, CA (US);

Inventors:

Conor F. Madigan, San Francisco, CA (US);

Alexander Sou-Kang Ko, Santa Clara, CA (US);

Jianglong Chen, San Jose, CA (US);

Assignee:

Kateeva, Inc., Menlo Park, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/00 (2006.01); B05D 5/06 (2006.01); C23C 14/24 (2006.01); C23C 14/22 (2006.01); C23C 14/04 (2006.01); C23C 14/12 (2006.01); H01L 51/00 (2006.01); H01L 51/56 (2006.01);
U.S. Cl.
CPC ...
H01L 51/0008 (2013.01); C23C 14/24 (2013.01); C23C 14/228 (2013.01); C23C 14/04 (2013.01); C23C 14/12 (2013.01); H01L 51/0013 (2013.01); H01L 51/56 (2013.01); H01L 51/0011 (2013.01);
Abstract

In one embodiment, the disclosure relates to providing a first gas stream carrying vaporized material and depositing the vaporized material onto a substrate by directing a plurality of gas streams containing the vaporized material to a substrate, forming an gas curtain around the streams to prevent its dissemination beyond a target print area, and allowing the vaporized material to condense on the target print area. In another embodiment, heat is used to regulate the flow of the material and the thickness of the deposited layer.


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