The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 19, 2014
Filed:
Jun. 13, 2011
Applicant:
Peter Van Der Meulen, Newburyport, MA (US);
Inventor:
Peter van der Meulen, Newburyport, MA (US);
Assignee:
Brooks Automation, Inc., Chelmsford, MA (US);
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/677 (2006.01); H01L 21/67 (2006.01); B25J 9/04 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67161 (2013.01); H01L 21/67178 (2013.01); H01L 21/67184 (2013.01); B25J 9/042 (2013.01); Y10S 414/137 (2013.01); Y10S 414/139 (2013.01);
Abstract
Methods and systems are provided for handling materials, including materials used in semiconductor manufacturing systems. The methods and systems include linear semiconductor processing facilities for vacuum-based semiconductor processing and handling, as well as linkable or extensible semiconductor processing facilities that can be flexibly configured to meet a variety of constraints.