The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 19, 2014

Filed:

Jun. 21, 2010
Applicant:

Bae-jin Kim, Suwon, KR;

Inventor:

Bae-Jin Kim, Suwon, KR;

Assignee:

Presys Co., Ltd., Suwon, KR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
F16K 25/02 (2006.01); F16K 3/18 (2006.01); F16K 31/122 (2006.01); F16K 37/00 (2006.01);
U.S. Cl.
CPC ...
Abstract

An up and down operating actuator unit which manages upward and downward motions of an opening and closing member, and a forward and backward actuator unit which manages forward and backward motions of the opening and closing member are configured so that the opening and closing member, which opens and closes a wafer movement path, can be accurately operated in an 'L'-shaped motion.


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