The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 19, 2014

Filed:

Mar. 13, 2012
Applicants:

Jinyan Zhang, Hubei, CN;

Ruichun Wang, Hubei, CN;

Xianhui Xia, Hubei, CN;

Inventors:

Jinyan Zhang, Hubei, CN;

Ruichun Wang, Hubei, CN;

Xianhui Xia, Hubei, CN;

Assignee:
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/00 (2006.01); C03B 37/018 (2006.01); C23C 16/511 (2006.01); H01J 37/32 (2006.01);
U.S. Cl.
CPC ...
H01J 37/32247 (2013.01); C03B 37/0183 (2013.01); C23C 16/511 (2013.01); H01J 37/32192 (2013.01); H01J 37/32229 (2013.01);
Abstract

A plasma microwave resonant cavity used for a plasma chemical vapor deposition (PCVD) apparatus comprises a resonant cavity housing and a waveguide device connected with the cavity housing. Two ends of the cavity housing are provided with coaxial through-holes along the axial direction of the cavity. A glass inner liner is arranged through the through-holes at the two ends, and runs through a cavity body and the through holes at the two ends. The glass inner liner comprises a glass cylinder and glass stop rings arranged at the two ends of the glass cylinder. One or two ends of the glass cylinder are provided with external threads. The glass stop rings are connected with the ends of the glass cylinder by screw holes formed on the glass stop rings.


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