The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 19, 2014
Filed:
Feb. 25, 2010
Tae-kyung Lee, Suwon-si, KR;
Jae-woo Chung, Yongin-si, KR;
Kyo-yeol Lee, Yongin-si, KR;
Hwa-sun Lee, Suwon-si, KR;
Seung-mo Lim, Suwon-si, KR;
Jae-chang Lee, Hwaseong-si, KR;
Tae-kyung Lee, Suwon-si, KR;
Jae-woo Chung, Yongin-si, KR;
Kyo-yeol Lee, Yongin-si, KR;
Hwa-sun Lee, Suwon-si, KR;
Seung-mo Lim, Suwon-si, KR;
Jae-chang Lee, Hwaseong-si, KR;
Samsung Electro-Mechanics Co., Ltd., Suwon-si, KR;
Abstract
A method of forming a piezoelectric actuator on a vibration plate to provide a driving force to each of a plurality of pressure chambers includes forming a lower electrode on the vibration plate, forming a piezoelectric layer on the lower electrode at a position corresponding to each of the pressure chambers, forming a supporting pad on the lower electrode, the supporting pad contacting one end of the piezoelectric layer and extending away from the one end of the piezoelectric layer, forming an upper electrode extending from a top surface of the piezoelectric layer to a top surface of the supporting pad, and bonding the upper electrode to a driving circuit above the supporting pad to receive a voltage from the driving circuit.