The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 12, 2014
Filed:
Oct. 02, 2007
Shigeki Nogami, Toyama, JP;
Mitsuru Funakura, Toyama, JP;
Isao Teranishi, Toyama, JP;
Tsukasa Yashima, Imizu, JP;
Hiroshi Ekko, Toyama, JP;
Shigeki Nogami, Toyama, JP;
Mitsuru Funakura, Toyama, JP;
Isao Teranishi, Toyama, JP;
Tsukasa Yashima, Imizu, JP;
Hiroshi Ekko, Toyama, JP;
Hitachi Kokusai Electric Inc., Tokyo, JP;
Abstract
To provide a substrate processing apparatus which can prevent a reduction in quality of a product, and damage to the apparatus. In a control program which operates on a substrate processing apparatus, a recipe storage portion and a parameter storage portion configure a data storage device which stores data relating to a control. On a user who has an authority being authenticated by an authentication process, the user carries out a data editing operation via an editing screen. A setting portion receives, via a UI device, operations for editing data stored by the data storage device. A timing portion measures a time between the operations received by the setting portion, and transmits the time to an operation control portion. In the event that the time measured by the timing portion has exceeded a prescribed time, the operation control portion prohibits the reception of the operations for editing the data.