The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 12, 2014
Filed:
Jul. 02, 2007
Osamu Wakabayashi, Hiratsuka, JP;
Takahito Kumazaki, Hiratsuka, JP;
Toru Suzuki, Oyama, JP;
Masashi Shinbori, Yokohama, JP;
Masaya Yoshino, Oyama, JP;
Osamu Wakabayashi, Hiratsuka, JP;
Takahito Kumazaki, Hiratsuka, JP;
Toru Suzuki, Oyama, JP;
Masashi Shinbori, Yokohama, JP;
Masaya Yoshino, Oyama, JP;
Komatsu Ltd., Tokyo, JP;
Ushio Denki, Tokyo, JP;
Abstract
An upper limit and a lower limit are preliminarily set for a spectral line width common to a plurality of narrow-band laser devices. When delivered or subjected to maintenance, the narrow-band laser device is caused to laser oscillate to detect its spectral line width before it is used as a light source for semiconductor exposure. A spectral line width adjustment unit provided in the narrow-band laser device is adjusted so that the spectral line width assumes a value between the upper limit and the lower limit. The present invention is able to suppress the variation in spectral line width such as E95 bandwidth caused by machine differences during the manufacture of the laser device, or by replacement or maintenance of the laser device, whereby the quality of integrated circuit patterns formed by the semiconductor exposure tool can be stabilized.