The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 12, 2014

Filed:

Mar. 05, 2012
Applicants:

Martin Hosek, Lowell, MA (US);

Christopher Hofmeister, Holderness, NH (US);

John F. Zettler, Stow, MA (US);

Alexander Krupyshev, Chelmsford, MA (US);

Sergei Syssoev, Towsend, MA (US);

Krzystof Majczak, Beverly, MA (US);

Inventors:

Martin Hosek, Lowell, MA (US);

Christopher Hofmeister, Holderness, NH (US);

John F. Zettler, Stow, MA (US);

Alexander Krupyshev, Chelmsford, MA (US);

Sergei Syssoev, Towsend, MA (US);

Krzystof Majczak, Beverly, MA (US);

Assignee:

Brooks Automation, Inc., Chelmsford, MA (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G01B 7/14 (2006.01);
U.S. Cl.
CPC ...
Abstract

An apparatus including a controller, a workpiece transport in communication with the controller having a movable portion and a transport path, and a multi-dimensional position measurement device including at least one field generating platen attached to the movable portion and at least one sensor group positioned along the transport path and in communication with the controller, the field generating platen is configured for position measurement and propelling the movable portion, each sensor in the at least one sensor group is configured to provide but one output signal along a single axis corresponding to a sensed field generated by the at least one field generating platen and the controller is configured calculate a multi-dimensional position of the movable portion based on the but one output signal of at least one of the sensors in the at least one sensor group, the multi-dimensional position including a planar position and a gap measurement.


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