The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 12, 2014
Filed:
Jul. 27, 2005
Yider Wu, San Jose, CA (US);
Unsoon Kim, San Jose, CA (US);
Kuo-tung Chang, Saratoga, CA (US);
Harpreet Sachar, Milpitas, CA (US);
Yider Wu, San Jose, CA (US);
Unsoon Kim, San Jose, CA (US);
Kuo-Tung Chang, Saratoga, CA (US);
Harpreet Sachar, Milpitas, CA (US);
Spansion LLC, Sunnyvale, CA (US);
Abstract
A method for forming a memory device is provided. A nitride layer is formed over a substrate. The nitride layer and the substrate are etched to form a trench. The memory device is pre-cleaned to prepare a surface of the memory device for oxide formation thereon, where cleaning the memory device removes portions of the barrier oxide layer on opposite sides of the trench. The nitride layer is trimmed on opposite sides of the trench. A liner oxide layer is formed in the trench.