The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 12, 2014
Filed:
Mar. 30, 2011
Dong-min Kang, Seoul, KR;
Heon Jin Park, Suwon-si, KR;
Kyoochul Cho, Yongin-si, KR;
Baiksoon Choi, Gyeonggi-do, KR;
Seunghyun Ahn, Suwon-si, KR;
Jeong Kwon, Ulsan, KR;
Jungig Jeon, Ulsan, KR;
Dong-Min Kang, Seoul, KR;
Heon jin Park, Suwon-si, KR;
Kyoochul Cho, Yongin-si, KR;
Baiksoon Choi, Gyeonggi-do, KR;
Seunghyun Ahn, Suwon-si, KR;
Jeong Kwon, Ulsan, KR;
JungIg Jeon, Ulsan, KR;
Samsung Electronics Co., Ltd., Suwon-si, Gyeonggi-do, KR;
Samyoung Pure Chemicals Co., Ltd., Seoul, KR;
Abstract
A titanium etchant composition and a method of forming a semiconductor device using the same, the titanium etchant composition including a titanium remover; a corrosion inhibitor; and a deionized water; wherein the corrosion inhibitor includes 5-aminotetrazole.