The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 12, 2014
Filed:
Sep. 02, 2010
Applicants:
Paul E. Burrows, Kennewick, WA (US);
Jeffrey Silvernail, Yardley, PA (US);
Julie J. Brown, Yardley, PA (US);
Inventors:
Paul E. Burrows, Kennewick, WA (US);
Jeffrey Silvernail, Yardley, PA (US);
Julie J. Brown, Yardley, PA (US);
Assignee:
Universal Display Corporation, Ewing, NJ (US);
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C 16/00 (2006.01); C23C 16/52 (2006.01); H01L 21/312 (2006.01);
U.S. Cl.
CPC ...
Abstract
High-throughput OVJP systems and methods are provided that may use multiple flow paths having different conductances to enable deposition with relatively short lag times. A high-throughput OVJP system may include a flow tube having a cross-sectional area much larger than the diameter of one or more apertures through which source material may be expelled during deposition. Use of such a configuration may allow for deposition with reduced lag times.