The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 12, 2014
Filed:
Dec. 30, 2011
Andrew N. Erickson, Santa Barbara, CA (US);
Jeffrey M. Markakis, Santa Barbara, CA (US);
Anton L. Riley, Solvang, CA (US);
Andrew N. Erickson, Santa Barbara, CA (US);
Jeffrey M. Markakis, Santa Barbara, CA (US);
Anton L. Riley, Solvang, CA (US);
Multiprobe, Inc., Santa Barbara, CA (US);
Abstract
A semiconductor wafer processing tool has a support structure for a coarse motion positioning system. A measurement head having a rigid super structure is supported from the support structure by vibration isolators and a top plate is mounted to the super structure. A vacuum transfer chuck is releasably carried by the coarse motion positioning system and releasably adherable to the top plate by application of vacuum. The vacuum transfer chuck supports a semiconductor wafer.