The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 05, 2014
Filed:
Jun. 24, 2011
Applicant:
Kazuhiro Tashiro, Yokohama, JP;
Inventor:
Kazuhiro Tashiro, Yokohama, JP;
Assignee:
Fujitsu Semiconductor Limited, Yokohama, JP;
Primary Examiner:
Int. Cl.
CPC ...
G01R 31/308 (2006.01); G01R 31/00 (2006.01); G01R 31/26 (2014.01); G01N 21/00 (2006.01); G01R 31/28 (2006.01);
U.S. Cl.
CPC ...
G01R 31/2887 (2013.01); G01R 31/2891 (2013.01);
Abstract
A prober includes a probe card provided with a support board and a probe attached to the support board, a stage on which a measurement wafer is mounted, a camera provided over the probe card to observe an electrode pad of a first semiconductor chip formed on the measurement wafer, and a stage moving unit for moving the position of the stage relative to the probe card.