The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 05, 2014
Filed:
Jul. 13, 2002
Efrain Quiles, San Jose, CA (US);
Mehran Behdjat, San Jose, CA (US);
Robert B. Lowrance, Los Gatos, CA (US);
Michael Robert Rice, Pleasanton, CA (US);
Brent Vopat, Topeka, KS (US);
Efrain Quiles, San Jose, CA (US);
Mehran Behdjat, San Jose, CA (US);
Robert B. Lowrance, Los Gatos, CA (US);
Michael Robert Rice, Pleasanton, CA (US);
Brent Vopat, Topeka, KS (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
In a first aspect, a first substrate processing system is provided that includes (1) a chamber having a plurality of opening through which a substrate may be transported; (2) a substrate carrier opener coupled to a first one of the plurality of openings; (3) a thermal processing chamber coupled to a second one of the plurality of openings; and (4) a wafer handler contained within the chamber, having a substrate clamping blade and a blade adapted to transport high temperature substrates.