The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 05, 2014

Filed:

Mar. 12, 2009
Applicant:

Bhushan L. Sopori, Golden, CO (US);

Inventor:

Bhushan L. Sopori, Golden, CO (US);

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/26 (2006.01); F27D 11/12 (2006.01);
U.S. Cl.
CPC ...
Abstract

An optical cavity furnacehaving multiple optical energy sourcesassociated with an optical cavityof the furnace. The multiple optical energy sourcesmay be lamps or other devices suitable for producing an appropriate level of optical energy. The optical cavity furnacemay also include one or more reflectorsand one or more wallsassociated with the optical energy sourcessuch that the reflectorsand wallsdefine the optical cavityThe wallsmay have any desired configuration or shape to enhance operation of the furnace as an optical cavityThe optical energy sourcesmay be positioned at any location with respect to the reflectorsand walls defining the optical cavity. The optical cavity furnacemay further include a semiconductor wafer transport systemfor transporting one or more semiconductor wafersthrough the optical cavity.


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