The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 05, 2014
Filed:
Mar. 15, 2011
Muhammad Rasheed, San Jose, CA (US);
Lara Hawrylchak, Gilroy, CA (US);
Michael S. Cox, Gilroy, CA (US);
Donny Young, San Jose, CA (US);
Kirankumar Savandaiah, Karnataka, IN;
Alan Ritchie, Menlo Park, CA (US);
Muhammad Rasheed, San Jose, CA (US);
Lara Hawrylchak, Gilroy, CA (US);
Michael S. Cox, Gilroy, CA (US);
Donny Young, San Jose, CA (US);
Kirankumar Savandaiah, Karnataka, IN;
Alan Ritchie, Menlo Park, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
In some embodiments, a feed structure to couple RF energy to a target may include a body having a first end to receive RF energy and a second end opposite the first end to couple the RF energy to a target, the body further having a central opening disposed through the body from the first end to the second end; a first member coupled to the body at the first end, wherein the first member comprises a first element circumscribing the body and extending radially outward from the body, and one or more terminals disposed in the first member to receive RF energy from an RF power source; and a source distribution plate coupled to the second end of the body to distribute the RF energy to the target, wherein the source distribution plate includes a hole disposed through the plate and aligned with the central opening of the body.