The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 05, 2014
Filed:
Nov. 11, 2009
Peter Merz, Beldorf, DE;
Manfred Weiss, Itzehoe, DE;
Peter Merz, Beldorf, DE;
Manfred Weiss, Itzehoe, DE;
Abstract
The invention relates to a micromechanical Coriolis rate of rotation sensor for detecting rates of rotation with components around measuring axes in three spatial directions which are orthogonal to one another. The Coriolis rate of rotation sensor has a substrate, a detection mass and at least two drive masses, wherein the drive masses can each be driven to perform a primary movement relative to the substrate. The direction of the primary movement of one of the at least two drive masses is perpendicular to the direction of the primary movement of another of the at least two drive masses. The detection mass is coupled to the drive masses. The invention also relates to an Inertial Measurement Unit (IMU) and to a method for detecting rates of rotation in three spatial directions which are orthogonal to one another.