The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 05, 2014
Filed:
May. 22, 2008
Young-ju Jeong, Chungcheongnam-do, KR;
Bok-kyu Lee, Chungcheongnam-do, KR;
Sun-kyu Hwang, Chungcheongnam-do, KR;
Jeong-yong Bae, Chungcheongnam-do, KR;
Soo-bin Yong, Chungcheongnam-do, KR;
Young-Ju Jeong, Chungcheongnam-do, KR;
Bok-Kyu Lee, Chungcheongnam-do, KR;
Sun-Kyu Hwang, Chungcheongnam-do, KR;
Jeong-Yong Bae, Chungcheongnam-do, KR;
Soo-Bin Yong, Chungcheongnam-do, KR;
Semes Co., Ltd., Chungcheongnam-do, KR;
Abstract
A method for drying substrates using isopropyl alcohol (IPA) includes: a pre-stage in which heated fluid is injected to a bottom surface of a substrate to raise a temperature of the substrate simultaneously to injection of an organic solvent to a top surface of the substrate and injection of a dry gas to the top surface thereof to improve a vaporization power of the organic solvent; and a final stage in which the injection of the heated fluid is stopped and the organic solvent and the dry gas are injected to the top surface of the substrate.