The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 29, 2014

Filed:

Dec. 09, 2010
Applicants:

Akira Tokuhisa, Tokyo, JP;

Naoto Inaba, Hiratsuka, JP;

Inventors:

Akira Tokuhisa, Tokyo, JP;

Naoto Inaba, Hiratsuka, JP;

Assignee:

Nikon Corporation, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03B 27/54 (2006.01); G03B 27/72 (2006.01); H01S 3/10 (2006.01); G03F 7/20 (2006.01); G02F 1/35 (2006.01);
U.S. Cl.
CPC ...
G03F 7/70025 (2013.01); G02F 1/353 (2013.01);
Abstract

A light source device including a seed light generation device, a light amplification unit which optically amplifies seed light generated by the seed light generation device, and a wavelength conversion unit which converts the wavelength of the light optically amplified by the light amplification unit. The seed light generation device includes a pulsed light generation unit which generates pulsed light having a single wavelength, a pulse modulation unit which selectively passes and extracts a part of the pulsed light, and a timing adjustment unit which relatively adjusts the extracting timing of the pulsed light by the pulse modulation unit during the generation period of the pulsed light by the pulse generation unit, according to an operation.


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