The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 29, 2014
Filed:
Oct. 13, 2011
Colby G. Rampley, Phoenix, AZ (US);
Frank T. Laver, Queen Creek, AZ (US);
Thomas E. Wood, Chandler, AZ (US);
Colby G. Rampley, Phoenix, AZ (US);
Frank T. Laver, Queen Creek, AZ (US);
Thomas E. Wood, Chandler, AZ (US);
Freescale Semiconductor, Inc., Austin, TX (US);
Abstract
A nano-scale tower structure array having increased surface area on each tower for gathering incident light is provided for use in three-dimensional solar cells. Embodiments enhance surface roughness of each tower structure to increase the surface area available for light gathering. Enhanced roughness can be provided by manipulating passivation layer etching parameters used during a formation process of the nano-scale tower structures, in order to affect surface roughness of a photoresist layer used for the etch. Manipulable etching parameters can include power, gas pressure, and etching compound chemistry.