The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 29, 2014
Filed:
Feb. 11, 2010
Alessandro Rocchi, Rosignano Solvay, IT;
Alessandro Rocchi, Rosignano Solvay, IT;
Maxim Integrated Products, Inc., San Jose, CA (US);
Abstract
The invention relates to a MEMS gyroscope for detecting rotational motions about an x-, y-, and/or Z-axis, in particular a 3-D sensor, containing a substrate, several, at least two, preferably four, drive masses () that are movable radially With respect to a center and drive elements () for the oscillating vibration of the drive masses () in order to generate Coriolis forces on the drive masses () in the event of rotation of the substrate about the x-, y-, and/or Z-axis. The oscillating drive masses () are connected to at least one further non oscillating sensor mass () that however can be rotated about the x-, y-, and/or Z-axis together With the oscillating drive masses () on the substrate. Sensor elements () are used to detect detections of the sensor mass () and/or drive masses () in relation to the substrate due to the generated Coriolis forces. At least two, preferably four anchors () are used to rotatably fasten the sensor mass () to the substrate by means of springs ().