The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 22, 2014

Filed:

Nov. 27, 2007
Applicants:

Hiroshi Gotou, Kobe, JP;

Katsufumi Tomihisa, Kobe, JP;

Aya Hino, Kobe, JP;

Hiroyuki Okuno, Kobe, JP;

Junichi Nakai, Kobe, JP;

Nobuyuki Kawakami, Kobe, JP;

Mototaka Ochi, Kobe, JP;

Inventors:

Hiroshi Gotou, Kobe, JP;

Katsufumi Tomihisa, Kobe, JP;

Aya Hino, Kobe, JP;

Hiroyuki Okuno, Kobe, JP;

Junichi Nakai, Kobe, JP;

Nobuyuki Kawakami, Kobe, JP;

Mototaka Ochi, Kobe, JP;

Assignee:

Kobe Steel, Ltd., Kobe-shi, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/43 (2006.01);
U.S. Cl.
CPC ...
Abstract

The present invention provides an Al alloy film for a display device, to be directly connected to a conductive oxide film on a substrate, the Al alloy film comprising Ge in an amount of 0.05 to 0.5 at %, and comprising Gd and/or La in a total amount of 0.05 to 0.45 at %, a display device using the same, and a sputtering target for the display device. For the Al alloy film of the present invention, even when a barrier metal is not provided, and a conductive oxide film and the Al alloy film are directly connected, the adhesion between the conductive oxide film and the Al alloy film is high, and the contact resistivity is low, and preferably, the dry etching property is also excellent.


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